지금 보고 계신 제품의 제조사에요
(주)씨엔원
제품 상세 정보
Traveling wave type ALD
ㆍTraveling wave type thermal ALD
ㆍLaminar gas flow (Side gas flow)
ㆍVariable gas delivery system : Bubbler, LDS
ㆍLow particle generation
ㆍVery small volume for process
ㆍAvailable laminated & mixed process
ㆍProcess temperature : up to 450°C
ㆍPrecursor canister : 4EA(standard)
ㆍSubstrate size :
4 ~ 8” wafer
2G : 370x470mm glass
ㆍApplications
Dielectric thin films : Al2O3, HfO2, ZrO2, TiO2, ZnO2, STO, ZnS, Laminate films, etc.
반도체 및 하이테크장비 제조업체, ALD, Coating Solution
CN1 Co., Ltd. is a semiconductor and high-tech equipments manufacturing company located in Dongtan Industrial Complex, Hwaseong, Gyeonggi, Korea.
We try our best to provide better equipment solution service based on many years of experience and technology.
We are doing our best rather than being the best with trust, sincerity, and responsibility.