지금 보고 계신 제품의 제조사에요
(주)씨엔원
제품 상세 정보
Showerhead type Plasma-Enhanced ALD (PE-ALD)
ㆍPlasma process & treatment
ㆍAdjustable the gap between showerhead and substrate
ㆍVariable gas delivery system : Bubbler, Vaporizer, LDS
ㆍCompletely separated source delivery
ㆍConfiguration ALD/CVD mode process
ㆍGood film uniformity & quality
ㆍProcess temperature : up to 500°C
ㆍPrecursor canister : 4EA(standard)
ㆍSubstrate Size : 4 ~ 12” wafer
ㆍApplications
Dielectric thin films : Al2O3, HfO2, ZrO2, TiO2, ZnO2, ZnS, GST, Laminate films, etc.
Nitride films : AlN, TiN, TiAlN, TaN, etc.
Metal films : Ru, Co, Ti, Ni, etc.
반도체 및 하이테크장비 제조업체, ALD, Coating Solution
CN1 Co., Ltd. is a semiconductor and high-tech equipments manufacturing company located in Dongtan Industrial Complex, Hwaseong, Gyeonggi, Korea.
We try our best to provide better equipment solution service based on many years of experience and technology.
We are doing our best rather than being the best with trust, sincerity, and responsibility.