Canisters
CN1 supplies various types of canister which contains liquid chemicals for ALD- and CVD-related processes in semiconductor-based industries
Product information
Product type
Feature & Advantages
ㆍVolume : 1~200 liter
ㆍ316L stainless body with EP treatment
ㆍMaximum safety and cost efficient
ㆍHydraulic pressure : 300kPa
ㆍLeak rate : under 2.0×10-9 mbar·l/sec
19 liter DLI Canister
Class |
Specification |
Transfer type |
DLI(Direct Liquid Injector) for LDS |
Valve type |
1/4″ Pneumatic diaphragm valve |
Gasket |
Teflon or Metal |
Inlet/Outlet port |
1/4″ Male VCR |
Refill port |
1/4″ or 1/2″ Male VCR |
Purge valve |
Option |
Level sensor |
Option |