제품사양
- KrF (ArF) Excimer Laser
- High precision optics, X-Y-Z stage
제품 설명
Model | LPD-EK500 |
Laser type | KrF (ArF) |
Wave length | 248 mm (193 nm) |
Average power | 10 W |
Pulse energy | 10 mJ @ 1000 Hz |
Pulse width | 10 ~ 25 nsec |
Pulse stability | ±3 % |
Cooling | water |
X-Y stroke | 500 mm x 500 mm |
Accuracy | ±4 ㎛ |
Repeatability | ±2 ㎛ |
Dimension | 1750 mm(W) x 1500 mm(D) x 1850 mm(H) |
- High precision micro processing system by excimer laser
- High power stability by new gas circulation system
- User friendly GUI with touch screen
- Drilling, Patterning etc