제품 사양
- Excimer laser micro machining system
제품 설명
Model | LPS-EKF100 |
Laser type | KrF |
Wave lenght | 248 mm |
Pulse repetition rate | < 200 Hz |
Average energy | < 100mJ |
Power stability | 5 % |
Warming up | 30 min. |
Gas lifetime | 20 x 10e6 pulses |
Beam dimension | 10 x 20 ㎟ |
Beam divergence | 3 x 10 mrad |
Laser tube lifetime | 1 x 10e8 pulses |
Cooling | water |
- Micro machine by excimer laser
- High power stability by new gas circulation system
- User friendly GUI with touch screen
- Precision machining of polymers, metal films
- Stripping of wires
- Surface cleaning
- Drilling via hole