제품 사양
Various wave length and energy
제품 설명
Model | EKF-000 | ECL-000 | EAF-000 |
Wave length | 248 nm | 308 nm | 193 nm |
Gas | KrF | XeCl | ArF |
Repetion rate(Hz) | 50, 100, 500, 1000 | ||
Energy/pulse (mJ) | 10, 30, 50, 100. 500, 1000 | ||
Cooling | 1st water, 2nd air or water | ||
Weight | chamber : ≤ 100 kg | ||
Dimension | 723(L) x 244(w) x 194(H) |
- Excimer laser for semiconductor exposure step
- Applied to LCD production line.