OVERVIEW
X-axis(±15), Y-axis (±15)
Pitch(±2.5°), Roll((±2.5°)
SPECIFICATIONS
Model No. | VAX-0000-A | VAZ-0000-A |
Table size (mm) | 000 * 000 | 000 * 000 |
Motion range (mm) | 00 | 00 |
Resolution (µm) | 0.00(Half Step) | 0.00(Half Step) |
Accuracy (µm) | 0 | 0 |
Repeatability (µm) | ±0 | ±0 |
Load capacity | 000kgf | 000kgf |
Guide mechanism | Cross roller Guide | Cross roller Guide |
Lead mechanism | Ball Screw,Lead 0mm | Ball Screw,Lead 0mm |
Encoder | ||
Drive type | 5-ph, Stepping motor | 5-ph, Stepping motor |
Vacuum Pressure | 5 * 10E-8torr | 5 * 10E-8torr |