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VACUUM FURNACES (TUBESTAR)
Model Name
TUBESTAR
Series
VACUUM FURNACES
Data
-
Manufacturer information
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ECM TECHNOLOGIES
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Industrial furnace manufacturer, ICBP, Carburizing furnaces, Vacuum furnaces, Induction furnaces and melting
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Manufacturer
ECM TECHNOLOGIES
Brand
-
SKU
131166
Product Name
VACUUM FURNACES (TUBESTAR)
Model Name
TUBESTAR
Size
-
Weight
-
Product Details

BATCH TYPE TUBE FURNACE FOR R&D & SMALL SCALE PRODUCTION

tube furnace

The TubeStar furnace platform is a compact batch type tube furnace. This platform is dedicated to diffusion, oxidation and deposition applications and has been designed to meet the needs of process engineering. The TubeStar range is modular and flexible. Indeed, it can be made of 1 to 4 independent tubes, with a capacity of 50 wafers per tube.

 

PLUS AND BENEFITS

The TubeStar furnace platform excels in the processing of small quantities of wafers, but also fits well with the treatment of large batches thanks to its flexibility. These have proven their efficiency during the qualification of process changes such as in PV manufacturing lines.

One of the key characteristics of this tube furnace lies in precision heat treatment combined with high levels of tuning flexibility. This allows a wide spectrum of applications.

 

POSSIBLE APPLICATIONS

  • Diffusion
  • LPCVD
  • Oxidation

 

EFFECTIVE DIMENSIONS
TUBESTAR

  • 100mm
  • 200mm
  • 300mm

 

OPTIONS

  • Atmospheric configuration
  • Primary vacuum pump
  • Secondary vacuum pump
  • LPCVD configuration
  • Process gas line
  • Wet oxidation
  • By-product treatment systems
ECM TECHNOLOGIESIndustrial furnace manufacturer, ICBP, Carburizing furnaces, Vacuum furnaces, Induction furnaces and melting
HISTORY OF OUR INDUSTRIAL FURNACE COMPANYThe ECM Group is the world leader in solutions and services for industrial heat treatments with strong value adding properties. Founded in 1928, the industrial furnace company Group ECM is known all over the world for its innovations, technologies, processes, solutions and services. Our vacuum furnaces have been developed for more than 50 years and constitute a referring basis for several thousands of units sold around the world: ICBP® installations, vacuum furnaces, induction furnaces, deposition furnaces, photovoltaic & crystal growth furnaces, and tailor-made furnaces. The whole engineering and manufacturing takes place in our French workshop based in our headquarters in Grenoble: 1 200 m² of offices, 8 000 m² of workshops, a R&D platform and a laboratory dedicated to metallurgy. All processes are mastered internally. ECM solutions represent 75% of all low pressure carburizing installations produced in the world (1 409 heat treating cells / 288 vacuum carburizing – ICBP® installations). Corporate social responsibility, values and the dedication of men and women all help ECM create reliable and relevant technological solutions to our clients. The quality of our relationships and continuous improvements are the basis of the company’s success. Our strong capacity to react is proven by the agility, flexibility and availability of our 450 collaborators and our 15 international subsidiaries (China, India, USA, Germany…)  
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