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MICHELAN C3
Model Name
MICHELAN C3
Series
Semiconductor Equipment
Data
-
Manufacturer information
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System Engineering Mega SolutionSemi conductor equipment, Display equipment and Material handling automation equipment manufacturer
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Manufacturer
System Engineering Mega Solution
Brand
-
SKU
28950
Product Name
MICHELAN C3
Model Name
MICHELAN C3
Size
-
Weight
-
Product Details

Overview

ICP Type Plasma Etcher for WLP, SOH, DPT Etching Process 


Feature

Process Performance

- Specialized Critical Etch Process
   : DRAM, Flash, 3D NAND and Logic Applications
- Fast Etch / Various Control Knobs for Uniform Etch Rate
- High Mask Selectivity / High Accuracy of CD Control
- Low Particle / Verticle Etching

Productivity / Hardware
- Cluster Transfer Module : Max. 6 Chambers
- Quadra Type Transfer Module : Max. 6 Chambers (All for Processing)
- ICP Type Etcher : High Plasma Density
- RF Sync Pulse Function : High Aspect Ratio
- Multi-Zone ESC Heating and 3Z-Tunale : Gas Radial Uniformity Control
- Low C.o.O / Long MTBC
- High Throughput

System Engineering Mega SolutionSemi conductor equipment, Display equipment and Material handling automation equipment manufacturer
SEMES, Korea’s leading semiconductor and display manufacturing equipment company, celebrates its 22nd anniversary this year. Back in 1993, the domestic semiconductor equipment industry was almost non-existent. Seeing an opportunity, SEMES focused on developing differentiated core semiconductor equipment technologies, which has matured us to compete in the global market. Thanks to our dedication to develop distinctive technological skills and manufacturing competitiveness, our goal now is becoming the first Korean company within the global top 5 of this industry. In addition, we have continued to create efficient and comfortable working environments based on a compliance management culture, which ensures the fairness and transparency of our business activities. Once again, I would like to thank everyone who has supported us throughout the years of business. In the future, SEMES will continue to focus on improving the quality of our products and services for our customers.
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