Miniature Multi Communication UV-NIR Spectrometer
VS70-MC (Multi Communication) is a high performance compact fiber coupled spectrometer system covering wide spectral range of 200 to 910 nm.
This OEM optical module is built around HORIBA’s type-IV Aberration-Corrected Flat-Field Holographic Ion-Etched concave grating and is specially designed to easily adapt to a large variety of detectors and electronic drivers. This system is fitted with an integrated order-sorting filter to eliminate higher orders.
The proprietary layout of the VS70-MC features a single-optics design for superior imaging, peak symmetry, flat spectral response, high resolution, high sensitivity and low-stray light performance. This system is very well suited for life sciences and semiconductor industry applications such as OES, reflectometry and quality control.
For OEM Industrial Applications
Ideal for UV-NIR industrial applications such as Optical Emission Spectrometry, Fluorescence, Absorbance and Reflectometry
Examples:
ㆍ Semiconductor (Plasma Monitoring and Wafer Inspection)
ㆍ Life Sciences
ㆍ Process and Quality Control
ㆍ Triple communication capability USB 2, Ethernet and EtherCAT
ㆍ High spectral resolution and system throughput
ㆍ Uniform Spectral Response
ㆍ Extended spectral coverage with high sensitivity from UV to NIR
ㆍ High SNR and wide dynamic range
ㆍ Enhanced Visual Design
ㆍ One stage TE cooling option available
OEM Spectrometer Selection Guide
| General Spectrometer Specifications* | |
|---|---|
|
Spectral Coverage |
200 - 910 nm |
|
Spectrometer Input |
Fiber coupled: FC or SMA; other options available upon request. |
|
Spectral Resolution |
< 2 nm |
| Average Spectral Dispersion |
25.2 nm/mm |
|
Focal Length |
70 mm |
| Options | Selection of high grade sensors: CMOS, B.I. CCD, PDA Input port: SMA, FC, free space, custom input |
|
F/# |
F/2.3 |
| Stray-light Rejection Typical (Maximum) |
≤ 0.4% at all applicable wavelengths by design Measured from 200 nm to 450 nm with a 550OG Schott Glass Filter and a tungsten broadband source |
|
Wavelength Accuracy |
≤ 0.4 nm (Average Absolute Wavelength Error) |
|
Software** |
LabVIEW™ acquisition software for initial evaluation (DLLs provided for software integration) |
| Detector Options and Specifications* | ||
|---|---|---|
| Linear back-illuminated CCD with large active area and high sensitivity | ||
| Detector Model | Hamamatsu CCD sensor S11071 with high spectral acquisition speed |
Cooled Hamamatsu CCD sensor S11851 with high spectral acquisition speed |
| Sensor Format | 2048 x 70 pixels, shorter version available on request |
|
| CCD Pixel Size | 14 x 14 μm | 14 x 14 μm |
| CCD Active Area | 28.7 x 1 mm | 28.7 x 1 mm |
| CCD QE | > 75% for 450-700 nm | > 75% for 450-700 nm |
| Sensor Temperature | Uncooled | Cooled (stabilized at 5°C) |
| Maximum Spectral Rate | 770 spectra/s | 770 spectra/s |
| Full Well Capacity | > 235,000 e¯ (typical); >200,000 e¯(minimum) | > 235,000 e¯ (typical); >200,000 e¯(minimum) |
| Readout Noise | 30 e- (typical); 35 e- (maximum) | 30 e- (typical); 35 e- (maximum) |
| Digitization | 16-bit | 16-bit |
| Dynamic Range (FW/RN) | 7,800:1 (typical) | 7,800:1 (typical) |
| SNR | ≥ 447:1 (Typical = 485:1) | ≥ 447:1 (Typical = 485:1) |
| Non-linearity (measured on each system) |
< 0.4% (corrected) | < 0.4% (corrected) |
| Dark current @ (25°C) | 50 e-/pix/s (typical); 500 e-/pix/s (maximum) | 7 e-/pix/s (typical); 70 e-/pix/s (maximum) |
| Communication Triger Capability (In and Out) |
Single mode: Ethernet/EtherCAT/USB 2.0 Dual mode: Ethernet & EtherCAT simultaneous |
Single mode: Ethernet/EtherCAT/USB 2.0 Dual mode: Ethernet & EtherCAT simultaneous |
| Environmental Conditions | Operating temperature 15°C to 40°C ambient Relative humidity <70% (non-condensing) Storage temperature -25°C to 45°C |
|
| Power Requirements | 24VDC Power Kycon 9-PIN DB9 Connector |
|
* HORIBA Instruments has a policy of continuous product development, and reserves the right to amend part numbers, descriptions and specifications without prior notice.
**No LabVIEW™ license is needed to run our acquisition software.
Quantum Efficiency
Mechanical Drawings
