Application
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- LCD/frat panel precess
- All other cluster vacuum systems
Features
- Semi standard application (Semi E21-94, Semi E24-92, Semi- E21.1-1296)
- Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with signifi-cantly reduced vibration
- Mechanical locking so at the end of gate travel the valve locks into position
- Welded bellows actuator seal
- Single pneumatic actuator
- Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly
Options
- Custom sizes available
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
Pressure range | 1 x 10-9 mbar to 1.2 bar | |
Leak rate : body, seat | < 1 x 10-9 mbar.ℓ/s | |
Differential pressure on the gate | ≤ 1.2 bar in either direction | |
Material | Valve body, Bonnet, Gate | AL6061 |
Welded bellows | AM350 | |
Valve actuator | SS304, AL6061 | |
Seal Materials | FKM(VITON) | |
Temperature | Valve body | 120℃ |
Valve actuator | 60℃ | |
Operation | Double acting | |
Cycle until first service | 2 million | |
Position sensor | FESTO : SME-8M-DS-24V-K-2.5-OE | |
