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Smart Exhaust Pressure Controller
Model Name
ATV3000
Series
Throttle Valve
Data
-
Manufacturer information
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ATOVAC

MFC Contorller, Convection Gauge & Controller, lon Gauge & Controller, Capacitance Manometer, Throttle Valve Controller

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Manufacturer
ATOVAC
Brand
-
SKU
129717
Product Name
Smart Exhaust Pressure Controller
Model Name
ATV3000
Size
-
Weight
-
Product Details

ATV3000 Smart Exhaust Pressure Controller

ATV3000 Exhaust Pressure Controller 는 진공 Chamber 의 압력을 조절하는데 사용된다. 

또한 넓은 범위의 압력을 조절할 수 있도록 제작 되었다. 

Controller 와 Valve 가 일체형으로 제작되어 추가적으로 Controller 를 사용하지 않아 원가 절감에 효과를 가질 수 있다. 


 


Features & Benefits

■ ATV3000 Smart Exhaust Throttle Valve 는 Micro-Stepping Motor 및 Direct Gear Driver 를 사용하여 Valve 의 Resolution 을 향샹 시켰고, 반 영구적으로 사용이 가능하다. 

■ ATV3000 Smart Exhaust Throttle Valve 는 High Torque Motor를 사용하기 때문에 Vacuum Line(예:12 inch) 이 Large Size Chamber 에서도 사용이 가능하다. 

■ ATV3000 Smart Exhaust Throttle Valve Body 는 150˚C 까지 Heating 을 하여도 사용이 가능하다. (Sealing Type 은 제외)

■ ATV3000 Smart Exhaust Throttle Valve 는 Flapper 의 Position 을 User 가 외부에서도 확인이 가능하도록 FND로 표시하여, Valve 의 동작여부를  장비에서 탈,착 하지 않아도 확인 가능하게 설계되어 있다. 

■ ATV3000 Smart Exhaust Throttle Valve 는 고객이 원하는 대로 주문시 Flange Style 을 설정할 수 있다.  (Flange Style : ISO-NW, ASA, CF, JIS , KF)

■ ATV3000 Smart Exhaust Throttle Valve 는 외부에서 DC Power (+24VDC) 를 공급받아야 사용이 가능하다. 




Specifications

Speed (open to close)

1.5sec 

Resolution

1/12000 

Drive Method

Direct gear drive 

Maximum Valve Body Operating Temperature

Standard 0-100

Optional : 0 - 150 (Note 1) 

Valve Motor Ambient

Operating Temperature

-20 to +40 

Differential Pressure

Across Valve

1 atm. (15psig) max. 

External Leakage at Shaft seal

1x10-8sec/sec He 

Materials Exposed to Process

Standard : 304 S.S., Viton (Note 2)

Optional :316 S.S., Viton (Note 2) 

Visual Position Indicator

FND

Drive Output Torque

(with Model GPC3000 or MKS Type 651)

800 in-oz 





Specifications

Speed (open to close)

1.5sec 

Resolution

1/24000 

Drive Method

Direct gear drive 

Maximum Valve Body Operating Temperature

Standard 0-100

Optional : 0 - 150 (Note 1) 

Valve Motor Ambient

Operating Temperature

-20 to +40 

Differential Pressure

Across Valve

1 atm. (15psig) max. 

External Leakage at Shaft seal

1x10-8sec/sec He 

Materials Exposed to Process

Standard : 304 S.S., Viton (Note 2)

Optional :316 S.S., Viton (Note 2) 

Compatible Controller

Model GPC3000

MKS Type 651, 1651 

Drive Output Torque

(with Model GPC3000 or MKS Type 651)

800 in-oz 


ATOVAC
MFC Contorller, Convection Gauge & Controller, lon Gauge & Controller, Capacitance Manometer, Throttle Valve Controller
Since our founding, we have been developing sensors and instrumentation for gas and vacuum control, which are at the heart of the semiconductor production process. Almost all products in the semiconductor market are foreign-made. Our products are cheaper than their foreign counterparts, and Atovac focuses on developing products with high performance. The products we develop are MFC, MFC Controller, Convection Gauge and Controller, Lon Gauge and Controller, Capacitance Manometer, Throttle Valve Controller, and other major components and sensors for vacuum equipment. We look forward to your continued interest and affectionate support for ATOVAC, a company that springs new ideas and creates a corporate culture that is always energized.
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