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Throttle Valve
Model Name
ATV1000
Series
Throttle Valve
Data
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ATOVAC

MFC Contorller, Convection Gauge & Controller, lon Gauge & Controller, Capacitance Manometer, Throttle Valve Controller

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Manufacturer
ATOVAC
Brand
-
SKU
129719
Product Name
Throttle Valve
Model Name
ATV1000
Size
-
Weight
-
Product Details

ATV1000 Throttle Valve

ATV1000 (Throttle Valve)는 진공 Chamber의 압력을 조절하는데 사용된다.

또한 넓은 범위의 압력을 조절할수 있도록 제작 되었다.

ATV1000 (Throttle Valve)는 GPC3000 (Auto Pressure Controller)와 호환하여 사용 하도록 설계 되어 있다.


 


Features & Benefits

■ ATV1000 (Throttle Valve)는 High Speed Motor를 장착하여 Set-Point의 도달하는 시간을 현저히 줄여 귀사의 장비의 Throughput을 향상시키도록 디자인 되어 있다.

■ ATV1000 (Throttle Valve)는 귀사에서 제공하는 GPC3000 Controller와 연결하여 사용이 가능하며, 기타 타 회사 제품의 Controller도 연결하여 사용할수 있다.

■ ATV1000 (Throttle Valve)는 Flapper의 Position을 User가 외부에서도 확인이 가능하도록 Case에 표시 하여, Valve의 동작여부를 장비에서 탈 착하지 않아도 확인 가능하게 설계되어 있다.

■ ATV1000 (Throttle Valve)의 Flang Style은 일반적으로 ISO-NW를 사용하지만 고객의 요구에 따라 CF, ASA, JIS 로도 가능하게 설계되어 있다.




Specifications

Speed (open to close)

1.5sec 

Resolution

1/24000 

Drive Method

Direct gear drive 

Maximum Valve Body Operating Temperature

Standard 0-100

Optional : 0 - 150 (Note 1) 

Valve Motor Ambient

Operating Temperature

-20 to +40 

Differential Pressure

Across Valve

1 atm. (15psig) max. 

External Leakage at Shaft seal

1x10-8sec/sec He 

Materials Exposed to Process

Standard : 304 S.S., Viton (Note 2)

Optional :316 S.S., Viton (Note 2) 

Compatible Controller

Model GPC3000

MKS Type 651, 1651 

Drive Output Torque

(with Model GPC3000 or MKS Type 651)

800 in-oz 


Closed Leakage

(valves with a flapper o-ring) 

<10-7(Torr l/s)> 

Flange Styles:

ISO-NW

ASA

CF

JIS

KF

Notes:

1. Consists with shaft seal and flapper seal o-ring material.

2. Where Vition is used, other materials are available.

Contact Applications Engineering.



ATOVAC
MFC Contorller, Convection Gauge & Controller, lon Gauge & Controller, Capacitance Manometer, Throttle Valve Controller
Since our founding, we have been developing sensors and instrumentation for gas and vacuum control, which are at the heart of the semiconductor production process. Almost all products in the semiconductor market are foreign-made. Our products are cheaper than their foreign counterparts, and Atovac focuses on developing products with high performance. The products we develop are MFC, MFC Controller, Convection Gauge and Controller, Lon Gauge and Controller, Capacitance Manometer, Throttle Valve Controller, and other major components and sensors for vacuum equipment. We look forward to your continued interest and affectionate support for ATOVAC, a company that springs new ideas and creates a corporate culture that is always energized.
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