Linear motor, Stage, Servo driver, Rotary DD motor, Multi controller, High precision motion stag and more
Description
- Stroke : 2,110mm×1,650mm
- Accuracy : 2㎛
- Repeatability :±1㎛
- Glass lifting & illumination axis(option)
Specification
Axis |
X₁, X₂ |
Y |
Work area |
1,900mm |
1,600mm |
Guide |
LM bearing |
|
Load mass |
30kg(Head) |
|
Speed |
500mm/sec |
|
Acceleration |
2m/sec² |
|
Position accuracy (보정후) |
2㎛ |
|
Repeatability |
±1㎛ |
|
Option |
Glass lifting & illumination axis |
|
Applications |
LCD thickness, height measurement equipment, etc. |