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LM Guide Stage - 300mm Wafer Cross Stage
Model Name
-
Series
Motion Stages
Data
-
Manufacturer information
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Justek

Linear motor, Stage, Servo driver, Rotary DD motor, Multi controller, High precision motion stag and more

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Manufacturer
Justek
Brand
-
SKU
55465
Product Name
LM Guide Stage - 300mm Wafer Cross Stage
Model Name
-
Size
-
Weight
-
Product Details

Description

- Stroke : 350mm×700mm
- Acceleraton : 10m/sec²
- Velocity : 1.5m/sec
- Accuracy : 3㎛
- Settling Time : 250msec/±0.5㎛
- Payload : 20kg

 

Specification

Axis

X

Y

Work area

700mm

350mm

Guide

LM Bearing

Load mass

20kg(Head)

Speed

1.5m/sec

Acceleration

10m/sec²

Position accuracy(보정후)

3㎛

Repeatability

±1㎛

Option  
Applications

Semiconductor repair equipment and others

Justek
Linear motor, Stage, Servo driver, Rotary DD motor, Multi controller, High precision motion stag and more
Ever since starting business from manufacturing linear motors in 1999, Justek has contributed to the growth of Electronic Component industry by developing key components and devices for precision motion control essential to produce production equipment for semiconductors and FPD(Flat Panel Display) including rotary direct drive motors, servo drivers, multi-axis controller, and high precision motion stages. In accordance with the customers’ demands for high speed and high precision, Justek pursues completeness in direct-drive technology in linear and rotary motions. Based on expertise and experiences acquired during the last decade, Justek focuses on developing the state-of-the-art technologies for direct drive motion control to keep the technological leadership in the global market. Justek also pursues better customer satisfaction through the close partnership. Justek strongly supports collaborative engineering with customers in developing new products and application systems.
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