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Linear motor, Stage, Servo driver, Rotary DD motor, Multi controller, High precision motion stag and more
Description
- Stroke : 350mm×700mm
- Acceleraton : 10m/sec²
- Velocity : 1.5m/sec
- Accuracy : 3㎛
- Settling Time : 250msec/±0.5㎛
- Payload : 20kg
Specification
Axis |
X |
Y |
Work area |
700mm |
350mm |
Guide |
LM Bearing |
|
Load mass |
20kg(Head) |
|
Speed |
1.5m/sec |
|
Acceleration |
10m/sec² |
|
Position accuracy(보정후) |
3㎛ |
|
Repeatability |
±1㎛ |
|
Option | ||
Applications |
Semiconductor repair equipment and others |