Linear motor, Stage, Servo driver, Rotary DD motor, Multi controller, High precision motion stag and more
Description
- Stroke : 2,100mm×2,100mm
- In-position stability : ±0.05㎛
- Repeatability :±1㎛
Specification
Axis |
X₁~ X₄ |
Y₁~ Y12 |
Work area |
2,100mm |
2,100mm |
Guide |
LM Bearing |
|
Load mass |
40kg(Head) |
|
Speed |
500mm/sec |
|
Acceleration |
1m/sec² |
|
Position accuracy(보정후) |
10㎛ |
|
Repeatability |
±1㎛ |
|
Option | ||
Applications |
LCD height measurement equipment etc |