Linear motor, Stage, Servo driver, Rotary DD motor, Multi controller, High precision motion stag and more
Description
- Dimension : 3,800mm×4,300mm
- Stroke : 2,510mm×2,590mm
- Repeatability : ±1㎛
Specification
axis |
X₁~ X₃ |
Y₁~ Y₄ |
Work area |
2,600mm |
2,600mm |
Guide |
LM bearing |
|
Load mass |
30kg(Head) |
|
Speed |
500mm/sec |
|
Acceleration |
1m/sec² |
|
Position accuracy (보정후) |
8㎛ |
|
Repeatability |
±1㎛ |
|
Option | ||
Applications |
LCD Auto Prober Etc |