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MEMS Foundry
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MEMS Foundry
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MicroinfinitySemi conductor sensor and Navigation sensor manufacturer, Aerospace, Telematics, Motion sensing, Intelligent robot development
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Manufacturer
Microinfinity
Brand
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SKU
43862
Product Name
MEMS Foundry
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Product Details

MEMS Foundry 

We possess MEMS foundry equipment ranging from photo lithography aligner to packaging equipment. This gives us the capability to obtain high level quality control. Especially we own DRIE equipment for Si dry etch processing, which is used in the development of high-end MEMS gyroscope, accelerometer, and pressure sensors. We specialize particularly on deposition and drying etching of Oxide mask (TEOS; SiO2) that is used in high aspect ratio silicon etch manufacturing. We provide high quality foundry services based on over ten years of experience with self-developed manufacturing techniques.

 

Processes

Wafer process Dry etching DRIE, SiO2,AL, Ashing
Deposition TEOS SiO2,Thermal evaporation
Thermal oxidation, PECVD SiO2
Photolithography x1 Aligner
Bonding Anodic
Packaging Interconnection Wire ball bonding
Vacuum packaging Wafer level anodic bonding
Inspection Geometry Microscope
Profile SEM, Laser profiler, Alpha-step, Nanospec

 

Facilities

Equipment Manufacturer Specifications
DRIE ADIXEN Aspect ratio: over 30
P-5000 Applied materials TEOS SiO2 deposition, SiO2 etching
Evaporator Korea vacuum tech Au, Al, Ti Cr
Bonder SUSS microtec Vacuum, Anodic, Eutectic, Adhesive
Aligner SUSS microtec 6"
Asher TEPLA Microwave type, Batch and specimen
Flip-chip bonder TRESKY 2mm x 2.5mm ~ 10mm x 12mm
Wire bonder Kulicke & soffa Manual ball bonder
Dicing saw Disco Si, Glass, Quartz, Sapphire, SiC etc
Alpha-step KLA-tencor Stylus type
Nanospec Nanometrics Range: 25~750,000Å
SEM TESCAN Resolution: 3.5nm x 4 ~ x 100000
Laser profiler Keyence Non-contact type
Microscope Nikon x5, x10, x20, x50
MicroinfinitySemi conductor sensor and Navigation sensor manufacturer, Aerospace, Telematics, Motion sensing, Intelligent robot development
Navigation is the technique of measuring position and attitude of moving objects. In recent years, the necessity of navigation has grown significantly, in the form of harmonized navigation solutions for Unmanned Aerial Vehicles (UAVs) and smart guided missiles, safety gear for vehicles, telemetry systems and intelligent cleaning robots. Other areas as the IT market have also benefited from this technology in fields such as virtual reality, gaming, and smart remote controllers. Microinfinity Co., Ltd. specializes in navigation system technologies and was founded on March 2001 by professionals with over 20 years of research experience in the field of aerospace navigation. The goal of Microinfinity is to create a world where people from various fields can use localization information anywhere, at any time, through navigation technology. Microinfinity was created to be a "Total navigation solution provider" that provides core parts, system planning, and solutions. Microinfinity's mission is to facilitate convenient and comfortable life quality through creative navigation products. To this end, Microinfinity has become a true navigation solution partner by producing the best sensor and system products. Microinfinity owns IP technology that starts from basic sensors to full navigation systems, and is becoming the world leading navigation system company.
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