UV-VIS-NIR Spectrometer
Horiba’s OEM division, a major supplier of OES solutions, has developed a high end OES Spectrometer with a proprietary optical configuration for broad coverage (185-1050 nm) and high resolution. The OES-Star is available with a selection of three UV-VIS-NIR Back-Illuminated (B.I.) sensors, one TE-Cooled and two uncooled CCD detectors. This unique OES system features an optical design that provides a high peak symmetry across a very broad spectral range combined with high spectral resolution better than 1 nm, at an unmatched aperture of F/2.3.
For OEM Industrial Applications
ㆍ Optical Emission Spectrometry
ㆍ Reflectometry
ㆍ Process and Quality Control
ㆍ Examples :
- Endpoint Detection
- Plasma Monitoring
- Semiconductor Wafer Inspection
ㆍ Optical emission spectrometry (OES)
ㆍ Unmatched long term stability and excellent wavelength accuracy
ㆍ USB2 Ethernet and EtherCAT interface
ㆍ High spectral resolution combined with high throughput
ㆍ Broad wavelength coverage from UV to NIR
ㆍ Multiple B.I. CCD options cooled/uncooled with high dynamic range
ㆍ CMOS sensor option with electronic shutter and ultra high spectral rate
Flat resolution and dispersion across the entire spectral range (185 -1050 nm) combined with excellent peak symmetry
This OES-Star is featuring a tall CCD with built in round-to-line (RTL) fiber converter to maximize light collection and therefore the system throughput. Input fiber with a core of 1 mm or smaller can be used. However to take advantage of the tall detector and RTL, larger core fibers are recommended.
Built-in round-to-line (RTL) converter boosts throughput when combined with a large core diameter fiber and our tall CCD (S13241-1108S)
Quantum Efficiency Plot
OEM Spectrometer Selection Guide
| General Spectrometer Specifications* | |
|---|---|
|
Spectral Coverage |
185 – 1050 nm (2048 horizontal pixel format with 14 µm pixel size) 200 – 1050 nm (2048 horizontal pixel format with 12 µm pixel size) |
|
Spectrometer Input |
SMA (standard), other input types available upon request |
|
Spectral Resolution |
<1 nm with 22 µm slit with very high symmetry across broad spectral range (flexible based on customer’s need) |
|
Average Spectral Dispersion |
34.6 nm/mm, 0.484 nm/pixel (14 µm pixel size), 0.41 nm/pixel (12 µm pixel size) |
|
Focal Length |
116 mm |
|
F/# |
F/2.3 |
|
Wavelength Accuracy |
< +/- 0.1 nm |
|
Stray Light |
< 0.1%* |
|
Software |
LabVIEW™ acquisition software for initial evaluation (DLLs provided for software integration) |
| CCD Detector Model | Cooled BI High-end CCD with best dynamic range (S13241-1108S) |
BI CCD Middle Grade (S14660-2048N) |
BI CCD cost effective (S11071-1106N) |
|---|---|---|---|
| CCD Sensor Format | 2048 x 256 | 2048 x 192 | 2048 x 70 |
| CCD Pixel Size | 12 x 12 μm | 14 x 14 μm | 14 x 14 μm |
| Image Size | 24.5 x 3.0 mm | 28.6 x 2.68 mm | 28.7 x 1.0 mm |
| CCD QE at 20°C | 90% or higher at the peak | High sensitivity over a wide spectral range |
> 75% for 450 - 750 nm |
| Deep Thermoelectric Cooling | -5º C | Non-cooled | Non-cooled |
| Full Well Capacity | 500,000 e¯/pixel (typical) | 200,000 e¯/pixel (typical) | >200,000 e¯/pixel (typical) >175,000 e¯/pixel (minimum) |
| Readout Noise | 50 e¯ (typical) (@ 1.5MHz sampling) |
40 e¯ (typical) 50 e¯ (maximum) |
35 e¯ (typical) 45 e¯ (maximum) |
| Digitization | 16-bit ADC | 16-bit ADC | 16-bit ADC |
| Dynamic range (FW/RN) | 10000:1 | 5000:1 | 5700:1 |
| Non-linearity (measured on each system) |
<1.8% (maximum) at low gain <0.9% (maximum) at high gain |
<0.1% (corrected) | <0.1% (corrected) |
| Dark Current | 1.5 e-/pixel/s (typical) @-5° C 15 e¯/pixel/s (maximum) |
50 e¯/pixel/s (typical) @ 20° C 500 e¯/pixel/s (maximum) |
50 e¯/pixel/s (typical) @ 20° C 500 e¯/pixel/s (maximum) |
| Environmental Conditions | Operating temperature 0° C to 40° C ambient Relative humidity <70% (non-condensing) Storage temperature -20° C to 50° C |
||
| Power Requirements AC/DC Power Supply (provided) |
90-264 VAC, 47–63 Hz | ||
*Specifications, form factor, and spectrometer cover subject to change without notice. No LabVIEW™ license is needed to run our acquisition software.
Mechanical Drawings
