Ion Sputter Coater-I (For SEM)
설명 : Ion Sputter Coater (경제적인 가격대의 이온코팅기)
특징
1) Flip-Top Target head for easy to access to speciment stage.
2) Sputter : Single Top Electrode Discharge System.
3) Easy to operate Pirani type Vacuum gauge with meter.
4) High speed coating for reduce heat damage.
5) All shapes, size coating uniformly
6) Compact design maximized limited space.
7) Various Models with different targets.
제품사양
lon Sputter Coater | |||
Sputtering System | Top Electrode Discharge System | Working Pressure | ~10 -1 Pa (~10 -3 Torr) |
High Tension power | DC 0 ~ 1.2 kV (Continuously variable) | Time unit range | 57mm dia Au disk (Standard) (Pt는 문의 요망) |
Vacuum Monitor | Pirani sensor control | Time unit range | 0.1sec, sec, min, hour |
Vent gas | N/A | Power | 220VAC, single phase |
Dimension(mm) | 300(H)X430(W)X320(D);Chamber 120(Dia)X110(H) | Weight (kg) | 15 |
Vaccum Pump | 100L |