설명
주사전자현미경(SEM) Chamber 내부에 시료를 장착한 후 당겨서 인장력 테스트를 하는 장치
제품사양
Nano Actuator | |||
Open-loop travel, -20 to 120V | 600(μm) | Closed-loop travel | 500(μm) |
Closed-loop/ Open-loop resolution | 1.4/0.5(nm) | Closed-loop linearity error | 0.03(%) |
Repeatability | ±5nm | Pitch/yaw | ±6 μrad±6 μrad |
Stiffness in motion direction | 0.1 N/μm | Load Capacity | 10 N max. |
Lateral force | 10 N max. | Operating temperature range | -20 to 80 |
Material | Aluminum | Dimension | 60mmx60mmx15mm(height) |
Mass | 0.24kg |