개요
H-SOH 공정 대응 차세대 Photo설비
특징
High Productivity
- Reduce Footprint and improved Throughput with a new SOH-exclusive Platform
Minimize Defects
- 2-block Vertical Robot System and optimized Environmental Control
- Contamination Prevention ni Baking Unit by supplying the Clean-air and improving Exhaust System
- Improved Air Flow Control System for Bake Chamber
Easy Maintanance
- Application of Equipment Condition Analysis and Self-diagnostic Function
- Improving Accessibility for easier Maintenance and Reducing MTBR