개요
Display Panel 제조 공정 중 식각 및 박리 공정을 담당하는 설비
특징
Varrious Application
- Various Display Capabilities : LCD / OLED / Flexible - U&I Type In-Line (Slope / Horizon / DIP)
High Performance
- Etch Rate Uniformity ≤ 5%↓
- CD Bias Uniformity ≤ 0.5㎛
- Temp. Control Accuracy :±0.5℃↓
Outstanding Advantage
- Chemical Fume and Particle Free (Non-contact Magnetic Transfer Mechanism
- Improvement of C.o.O