Semi conductor equipment manufacturer, Central monitoring system, Semi conductor process equipment, Multimedia equipment and more
Wafer Sorter 200은 200mm 반도체 공정에서 Wafer Aligning 및 ID Reading 후, 각 Recipe에 의해 Wafer를 원하는 위치로 Sorting 하는 기능의 장비입니다.
Specification
- Semi Standard Compliance
- 2~6 Cassette Stage(Customized Product)
- Bluecord's Wafer Pre-Aligner
- Wafer Transfer Robot(Vacuum Type)
- Wafer ID Reader(Front & Back side)
- Easy Operationg & Maintenance