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Aligner
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Series
Semiconductor Equipment
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BLUE CORD

Semi conductor equipment manufacturer, Central monitoring system, Semi conductor process equipment, Multimedia equipment and more

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Manufacturer
BLUE CORD
Brand
-
SKU
130601
Product Name
Aligner
Model Name
-
Size
-
Weight
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Product Details

Wafer Image 검출 장치와 Moving 장치(θ축, X축, Z축)등으로 구성되며, 고 분해능의 Linear CCD Sensor를 적용하여 Wafer Edge 및 Notch에 대한 Image Data를 고속 처리함으로써, 편심을 보정하고 Flat 또는 Notch를 임의의(User Setting) 각도로 정확하게 신속하게 정렬하는 장치입니다.

 

Specification

- Particle 최소화를 위한 최소 접촉 방식의 Chuck 설계

- Class_1 대응 및 오염 방지를 위한 Inner Filter 채용

- 6", 8", 12" Wafer 공용 가능한 우수한 확장성

- 최소 Footprint 248×285×230mm

- X, Z, θ의 Module Block화로 Maintenance가 용이

- Cycle time 4sec 이내

- 정밀한 위치 제어를 위한 Micro Stepping Driver 채용
   Precision X ± 0.035mm
   Precision θ ± 0.035mm

BLUE CORD
Semi conductor equipment manufacturer, Central monitoring system, Semi conductor process equipment, Multimedia equipment and more
Bluecord was established as the first research center-oriented technology-intensive SME in Korea with the goal of localizing the semiconductor equipment sector, commercializing new technologies, and improving research productivity. We have developed advanced equipment such as clean room monitoring control system, wafer sorter, wafer aligner, etc. in the semiconductor equipment field and occupy a firm position in the domestic semiconductor equipment industry. We promise to continue to strive to become a world-class high-tech company under the management policy of realizing creative surplus management, improving future-oriented management, and building a community corporate culture.
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