Semi conductor equipment manufacturer, Central monitoring system, Semi conductor process equipment, Multimedia equipment and more
300mm EFEM은 Track장비, Wet Etcher등 반도체 전공정 장비의 Wafer Loading & Unloading을 수행하는 장비입니다.
Specification
- 2~4 Load Port in Frong(Customized Product)
- Semi Standard Compliance
- Linear Track for Wafer Transfer Robot Traveling
- Easy Operating & Maintenance
- PIO Sensor & RFID Read/Write
- Enclose Structure
- Fastest cycle time(Hight throughput)
- Wafer Cooling
- Communications : SECS Ⅰ / SECS Ⅱ / GEM