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EFEM
Model Name
-
Series
Semiconductor Equipment
Data
-
Manufacturer information
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BLUE CORD

Semi conductor equipment manufacturer, Central monitoring system, Semi conductor process equipment, Multimedia equipment and more

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Manufacturer
BLUE CORD
Brand
-
SKU
130597
Product Name
EFEM
Model Name
-
Size
-
Weight
-
Product Details

300mm EFEM은 Track장비, Wet Etcher등 반도체 전공정 장비의 Wafer Loading & Unloading을 수행하는 장비입니다.

 

Specification

- 2~4 Load Port in Frong(Customized Product)

- Semi Standard Compliance

- Linear Track for Wafer Transfer Robot Traveling

- Easy Operating & Maintenance

- PIO Sensor & RFID Read/Write

- Enclose Structure

- Fastest cycle time(Hight throughput)

- Wafer Cooling

- Communications : SECS Ⅰ / SECS Ⅱ / GEM

BLUE CORD
Semi conductor equipment manufacturer, Central monitoring system, Semi conductor process equipment, Multimedia equipment and more
Bluecord was established as the first research center-oriented technology-intensive SME in Korea with the goal of localizing the semiconductor equipment sector, commercializing new technologies, and improving research productivity. We have developed advanced equipment such as clean room monitoring control system, wafer sorter, wafer aligner, etc. in the semiconductor equipment field and occupy a firm position in the domestic semiconductor equipment industry. We promise to continue to strive to become a world-class high-tech company under the management policy of realizing creative surplus management, improving future-oriented management, and building a community corporate culture.
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