Semi conductor equipment manufacturer, Central monitoring system, Semi conductor process equipment, Multimedia equipment and more
The Bluecord Edge Grip Aligner is a high reliable product having high-precision mechanics.
By excluding vacuum-operated chuck, the model EGA300C is free of backside contamination of wafer.
Specification
- Modular wafer edge grip aligner with No external dedicated controller Footprint advantage, improved wafer flow
- free for the backside contamination
- Provide dual mode operation such as "Hi accuracy / Hi speed" mode
- Class 1 cleanroom compatible
- Highly reliable and repeatable positioning
- Fastest cycle time (High throughput)
- Easy to use and install