GENERAL SPECIFICATIONS | |||
Resolution | 5nm@30kV (20kV Standard) | Accelerating Voltage | 0.2kV ~ 20kV (Option : 30kV) |
Magnification | 10X ~ 150,000X(Max.) (Additional Digital Zoom 2X, 4X, 8X) |
Detector | SE Detector / BSE Detector(Option) |
Stage Stroke | Stage : X,Y(40mm) / Z(5~40mm) (Tilt 0° ~ 45°, Rotation 360°) |
Frame Memory | Area Mode : [640X480] Inspection Mode : [960X640 ~ 2048X1536] Photo Mode : [2048X1536 ~ 8192X6144] |