ELECTRON OPTIC SYSTEM | |||
Resolution | 4nm@SE | Magnification | 10X ~ 200,000X(Max.) (Additional Digital Zoom 2X, 4X, 8X) |
Accelerating Voltage | 0.2kV ~ 20kV | Image Shift | 250μm (X,Y), Image Rotation (360°) |
Stage Motorization & Movement (X, Y, Z)mm | Standard : 5-Axis Manual Stage Option : 3-Axis[X, Y, R] Motorized Stage : 50/60/45 mm (Tilt 0° ~ 60°, Rotation 360°) |
Option | BSE, EDS, Cooling Stage 외 |